產品
- RV系列雙級旋片泵
- E2M系列雙級旋片泵
- nES系列單級旋片泵
- ES系列單級旋片泵
- nXDS系列干式渦旋泵
- nXLi系列干式真空泵
- EDC系列爪式真空泵
- EOSi系列噴油螺桿泵
- EH系列羅茨真空泵
- EDS系列干式螺桿泵
- GXS系列干式螺桿泵
- GV系列爪式真空泵
- T-Station渦輪分子泵小車
- STP系列渦輪分子泵
- Stokes滑閥泵
- Stokes 6羅茨泵
- D-LAB系列隔膜真空泵
- nEXPT系列分子泵站
- nEXT系列渦輪分子泵
- EDP系列化工爪式干泵
- CXS系列化工螺桿真空泵
- CDX系列化工螺桿真空泵
- HT系列油蒸汽擴散泵
- iH系列半導體真空干泵
- iXH系列半導體真空泵
- iXL系列半導體真空干泵
- EPX系列半導體真空干泵
- GX系列半導體干式泵
產品詳情
簡單介紹：
Edwards iTIM E73 & Al & T1 & Gate Valve Control for iH pumps. 控制器
Edwards iTIM E73 & Al & T1 & Gate Valve Control for iH pumps. 控制器
詳情介紹：
PN D37420000
An iTIM may be used to provide control and monitoring of the IH pump by your Process Tool, using a parallel digital interface. The iTIM has a number of advanced features.
? Digital connections for up to 3 different types of tool interface on each iTIM.
? Convenient mounting on the rear of the pump, rapid two point fixing.
? Configurable connectivity to enable AUC functionality to be readily customised.
? Gate valve control is included in this module as standard.
? The iTIM has a set point store, which allows pump set points relating to a particular process or recipe to be saved. These set points are automatically to be loaded into pump on power up, including new pumps when one is replaced.
Where these modules already exist they may be utilised to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. However the iTIM provides improved performance over the iM modules, for example full AUC functionality is only available using the iTIM.
? Digital connections for up to 3 different types of tool interface on each iTIM.
? Convenient mounting on the rear of the pump, rapid two point fixing.
? Configurable connectivity to enable AUC functionality to be readily customised.
? Gate valve control is included in this module as standard.
? The iTIM has a set point store, which allows pump set points relating to a particular process or recipe to be saved. These set points are automatically to be loaded into pump on power up, including new pumps when one is replaced.
Where these modules already exist they may be utilised to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. However the iTIM provides improved performance over the iM modules, for example full AUC functionality is only available using the iTIM.
